Published date: Sep 05 2016

Journal Title: KnE Engineering

Issue title: Conference on Science and Engineering for Instrumentation, Environment and Renewable Energy

Pages:

DOI: 10.18502/keg.v1i1.500

Dahyunir Dahlandahyunir@yahoo.com

The synthesis of Fe-doped TiO₂ thin film using spin coating method was studied. Effects of aging time on the deposited thin film were investigated. Titanium butoxide (C₁₆H₃₆O₄Ti) as a precursor solution was mixed with the FeCl₃. Spin coating process was carried out on three types of precursor solution: (1) spin-coating process performed immediately after the precursor solution was made, (2) spin-coating process performed after solution was aged for 24 hours, (3) aged for 24 and (4) spin-coating after aging the precursor for 72 hours. Heating was carried out on the resulting thin film at temperature of 400 °C. The morphology of TiO₂ layers was characterized using Scanning Electron Microscope (SEM) and Atomic Force Microscope (AFM). Elemental and phase composition of the films was determined using EDX and X-ray diffraction (XRD). We found that the best TiO₂ layer is obtained when spin-coating process is done after aging the precursor for 72 hours. The layer shows a more uniform particle distribution on the substrate and a more monodisperse particle size dominated by the anatase phase.

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