Published date: Oct 08 2018

Journal Title: KnE Engineering

Issue title: Breakthrough directions of scientific research at MEPhI: Development prospects within the Strategic Academic Units

Pages: 380–384

DOI: 10.18502/keg.v3i6.3018

D S VeselovDSVeselov@mephi.ru

Y A Voronov

Y R Shaltaeva

The article studies effect of solid precipitate building up that prevents etching of silicon in a solution of ethylenediamine and pyrocatechol. The article provides technology recommendations that allow avoiding the formation of the undesirable solid precipitate.

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