Published date: Apr 25 2018

Journal Title: KnE Energy

Issue title: VII International Conference on Photonics and Information Optics (PhIO)

Pages: 83–89

DOI: 10.18502/ken.v3i3.2016

P Zolotovzolotov@scontel.ru

A Divochiy

Y Vakhtomin

V Seleznev

P Morozov

K Smirnov

We optimized technology of thin VN films deposition in order to study VN-based superconducting single-photon detectors. Investigation of the main VN film parameters showed that this material has lower resistivity compared to commonly used NbN. Fabricated from obtained films devices showed 100% intrinsic detection efficiency at 900 nm, at the temperature of 1.7 K starting with the bias current of 0.7·I

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