KnE Energy
ISSN: 2413-5453
The latest conference proceedings on energy science, applications and resources
Preparation of Silcon Nanoparticles and Films By Pulsed Laser Deposition
Published date: Apr 17 2018
Journal Title: KnE Energy
Issue title: The 2nd International Symposium "Physics, Engineering and Technologies for Biomedicine"
Pages: 29–31
Authors:
Abstract:
Silicon films and nanoparticles were prepared by pulsed laser deposition under irradiation of crystalline silicon targets in residual inert gas atmosphere. Properties the prepared samples were investigated by means of the scanning probe microscopy.
Keywords: pulsed laser deposition, scanning probe microscopy, silicon film, nanoparticles.
References:
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[2] A.V. Kabashin, J.-P. Sylvestre, S. Patskovsky, M. Meunier. Correlation between photoluminescence properties and morphology of laser-ablated Si/SiO